Product Overview
Omni R&D, LLC introduces the ORDTF-1200C-SL-PECVD, a state-of-the-art single temperature zone slide rail PECVD system designed for the growth and preparation of experimental pilot-scale graphene and carbon nanotubes. This advanced laboratory equipment is ideal for preparing high-quality transparent conductive films for applications in mobile phone touch screens, tablet computers, smart wear, sensors, and other fields. With its superior temperature control, efficient heating system, and user-friendly interface, the ORDTF-1200C-SL-PECVD is the perfect tool for material process research in scientific institutions.
The ORDTF-1200C-SL-PECVD features a heating chamber made of alumina fiber products, which ensures rapid temperature rise and low heat storage due to its extremely low thermal conductivity and specific heat capacity. The resistance wire heating element promotes uniform temperature distribution within the furnace. The system employs a classic closed-loop negative feedback control system for precise temperature regulation, utilizing an intelligent program temperature adjustment instrument and a power modulator. The K-type thermocouple temperature measuring element, combined with a single-loop temperature controller that self-tunes PID parameters, allows for seamless adjustment of output signals based on different heating and cooling requirements. High-quality imported electrical components ensure high performance, reliability, and maintenance-free operation.
Features:
- Maximum temperature of 1200°C with an operating temperature of ≤1100°C
- Effective furnace size of Φ100mm, suitable for 2-3 inch samples (customizable)
- 30-stage programmable temperature control with PID parameter self-tuning
- Resistance wire heating element for uniform temperature distribution
- PE RF power supply with 0W~500W output range and ≤5W power stability
- Three-way proton flow control system with high-accuracy mass flow controllers
- Low vacuum unit with 10m³/h pumping rate and 5X10-1Pa ultimate vacuum
Specifications:
- Heating System:
- Maximum Temperature: 1200°C
- Operating Temperature: ≤1100°C
- Effective Furnace Size: Φ100mm
- Furnace Material: Alumina, high-temperature fiber products
- Thermocouple Type: K-type thermocouple
- Temperature Control Accuracy: ±1°C
- Temperature Control Method: 30-stage programmable, PID parameter self-tuning
- Heating Length: 440mm
- Constant Temperature Length: 200mm
- Heating Element: Resistance wire
- Power Supply: Single phase, 220V, 60Hz
- PE RF Power Supply:
- Power Output Range: 0W~500W
- Maximum Reflected Power: 100W
- RF Output Interface: 50 Ω, N-type, female
- Power Stability: ≤5W
- Harmonic Components: ≤-50dbc
- Supply Voltage: Single-phase AC (187V-253V), 50/60HZ
- Overall Efficiency: >=70%
- Power Factor: >=90%
- Cooling Method: Forced air cooling
- Three-way Proton Flow Control System:
- Connector Type: Double ferrule stainless steel fittings
- Standard Range (N2): 50sccm, 100sccm, 500sccm (customizable)
- Accuracy: ±1.5%FS
- Linearity: ±1%FS
- Repeatability: ±0.2%FS
- Response Time: Gas characteristics: 1~4 Sec, electrical characteristics: 10 Sec
- Working Pressure Range: 0.1～0.5MPa
- Maximum Pressure: 3MPa
- Interface: Φ6,1/4''
- Display: 4-digit display
- Working Temperature: 5~45°C, high purity gas
- Low Vacuum Unit:
- Relative Humidity: ≤85%
- Working Environment: 5°C～40°C
- Working Voltage: 220V±10%, 50~60HZ
- Power: 1KW
- Pumping Rate: 10m³/h
- Ultimate Vacuum: 5X10-1Pa
- Working Pressure Range: 1.01325X105～1.33X10-2Pa
- Withstand Voltage: 0.03MPa
- Oil Capacity: 1.1L
- Inlet Diameter: KF25
- Exhaust Port Diameter: KF25
- Noise: 50dB
- Connection Method: Using bellows, manual flapper valve connected to bellows
Equipped With:
- Alumina fiber heating chamber for rapid temperature rise and low heat storage
- Resistance wire heating element for uniform temperature distribution
- Intelligent program temperature adjustment instrument and power modulator for precise control
- K-type thermocouple temperature measuring element for accurate readings
- Single-loop temperature controller with self-tuning PID parameters for seamless output adjustment
- High-quality imported electrical components for reliability and maintenance-free operation
- PE RF power supply with adjustable output range and high power stability
- Three-way proton flow control system with high-accuracy mass flow controllers
- Low vacuum unit with high pumping rate and low ultimate vacuum
- Bellows and manual flapper valve for secure connections
