Product Overview
Introducing our advanced vapor deposition equipment, a perfect blend of precision, efficiency, and user-friendly design. This system is equipped with a front-end preheating furnace to facilitate the evaporation of solid sources, and a double-temperature zone heating furnace at the rear for accurate temperature control and straightforward operation. It's an ideal solution for the growth process of vapor deposition and two-dimensional materials.
The main unit, an open type double temperature zone tube furnace, features a robust heating element and a heating zone length designed for optimal performance. With a maximum temperature that reaches well into the high-temperature range, it ensures precise temperature control through its advanced fuzzy PID control and self-tuning adjustment.
The system also includes a preheating furnace with a maximum temperature designed for preheating needs, and a 3-way gas supply system for efficient gas supply. A high-capacity vacuum pump ensures optimal vacuum conditions for your processes, with a pumping rate that guarantees efficient operation.
This equipment is designed with the user in mind, featuring intelligent multi-segment programmable control, an alarm function for overheating and broken thermocouple, and an open-type furnace door structure for easy access.
Elevate your research and production capabilities with our vapor deposition equipment, designed for precision, efficiency, and ease of use.
The system also includes a preheating furnace with a maximum temperature designed for preheating needs, and a 3-way gas supply system for efficient gas supply. A high-capacity vacuum pump ensures optimal vacuum conditions for your processes, with a pumping rate that guarantees efficient operation.
This equipment is designed with the user in mind, featuring intelligent multi-segment programmable control, an alarm function for overheating and broken thermocouple, and an open-type furnace door structure for easy access.
Elevate your research and production capabilities with our vapor deposition equipment, designed for precision, efficiency, and ease of use.
Specifications:
Open Type Double Temperature Zone Tube Furnace ORDTF-1200C-Ⅱ
- Tube size: Φ50*1000mm
- Heating element: Resistance wire (Fe-Cr-Al Alloy doped by Mo)
- Heating zone length: 200+200mm
- Constant temperature zone length: 100+100mm
- Working temperature: 1100℃
- Max temperature: 1200℃
- Temperature control mode: Fuzzy PID control and self-tuning adjustment, intelligent 30 segments programmable control, with alarm function of overheating and broken thermocouple.
- Temperature accuracy: ±1℃
- Heating rate: 10℃/min
- The furnace door structure: Open type
- Power supply: AC220V 50/60Hz
- Rated power: 35KW
Preheating Furnace ORDTF-400C
- Heating zone length: 100mm
- Max temperature: 400℃
- Temperature control mode: Intelligent 30 segments programmable control
- Temperature accuracy: ±1℃
- Rated power: 800W
- Power supply: AC220V 50/60Hz
- Heating element: Resistance wire
3-way Gas Supply System ORDGMF-3Z
- Dimensions: 600x600x650mm
- Connector type: Stainless steel connector with double sleeve
- Standard range (N2): 100sccm 、200sccm、500 sccm (optional range)
- Accuracy: ±1.5%
- Linearity: ±0.5~1.5%
- Repeatability: ±0.2%
- Response time: Gas characteristic:1~4 Sec Electrical characteristic: 10Sec
- Working differential pressure range: 0.1~0.5 MPa
- Max pressure: 3MPa
- Interface: Φ6,1/4''
- Display: LCD
- Working ambient temperature: 5~45℃ High purity gases
- Inner and outer double cast stainless steel tube: Φ6
- Vacuum pressure gauge: -0.1~0.15MPa (0.01MPa/grid)
- Stop valve: Φ6
ORDVAU-02
- Dimension: 600*600*600mm
- Relative air humidity: ≤85%
- Power supply: 220V ± 10% 50/60Hz
- Power: 400W
- Pumping rate: 165L/min
- Ultimate vacuum: 4X10-2Pa
- Experimental vacuum degree: 5×10 -1 Pa (no load)
- Oil capacity: 1.1L
- Gas inlet caliber: KF25
- Gas outlet caliber: KF25
- Rotate speed: 1450rpm
- Noise: 50db
Warranty Information
One (1) Year Parts Warranty and Lifetime Phone Support.
